Microscan Extension – MSE-G2

SCAN OPTICS FOR ULTRA HIGH RESOLUTION APPLICATIONSS

“World’s sharpest laser blade”
High resolution machining with focus diameters
down to 1μm in UV

Enhance your laser machine into a microscan system

Compatible with a wide range of galvanometer scanners

MicroSpot Scanning

With the Microscan Extension MSE-G2, Pulsar Photonics offers a simple but powerful extension for any Galvo scanning system. By simply replacing a conventional objective with the MSE-G2, users can upgrade their system to a microspot scanning system. The combination of galvanometer scanner and MSE-G2 enables high precision machining with a focus diameter of less than 4μm. This enables the production of the smallest components with unmatched accuracy and level of detail. We offer the system for IR, VIS but also UV laser sources.

Applications

  • Microablation
  • Micro marking
  • Micro drilling (diameter a few µm)
  • Repair of electronics / displays

In combination with our own software “Photonic Elements” the full potential of this optics can be exploited and complex geometries and work processes can be generated automatically. The optics are available both as an extension to existing systems and as a stand-alone variant including a scanner .

MSE-G2 microspot optics with coaxial camera as a simple extension for any galvanometer scanner

Applicationexamples

Production of
micro apertures

Micro-apertures with diameters up to 1.6µm
.

Micro drilling of
thin foils

High-precision bores with diameters of typ. 3 µm

High resolution
Micro marking

High resolution QR code with
Dimensions 300 µm x 300 µm

Electronic Repair –
Microbalation

Making isolation trenches in electronic circuits

Functionalization of tools

Insertion of functional microstructures in tools

TECHNICAL DATA

Microscan Extension MSE-G2
– IR/VIS Version: MSE-G2 IR/VIS
– UV Version: MSE-G2 UV
Max. Dimensions: (L x B X H): 245mm x 145mm x 120mm
Working distance:
IR/VIS > 20 mm
UV > 10 mm
Scanfeld-Size: typ. 500µm x 500µm
Wavelengths:
– IR (1030-1070nm) + VIS (515-532nm) (IR/VIS Version)
– UV (355nm) (UV Version)
Spot sizes (for laser source with M²<1.3):
– <4 µm in IR
– <2 µm in VIS
– <1.5 µm in UV
Mounting thread: M85x1 (standard galvo scanner)
Integrated coaxial camera
– FOV: > 500µm x 500µm
– for fast process setup
– Lateral and axial adjustment of the focus position
Integrated collision protection
Suitable only for low medium laser powers (USP laser, ns laser)

Your personal contact

Dipl.-Phys. Patrick Gretzki
Sales of optical systems

+49 (0) 2407 / 55 555 – 36
systems@pulsar-photonics.de
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